Skanning 130x85 PIEZO (D)

Scanning Stage 130x85 PIEZO (D) for Axio Imager - with linear encoders and piezo drive - travel range 130 mm x 85 mm - max speed 100 mm/s - resolution: 0.1 µm - reproducibility: +/- 0.6 µm - absolute accuracy: +/- 3 µm - travel range adjustable - for mounting frames 160 x 116 mm and Z-PIEZO